The screw vacuum pump is derived from the screw compressor and screw liquid delivery pump, and is an ideal vacuum pump among positive displacement vacuum pumps. It can provide a clean vacuum environment and has strong adaptability to corrosive gases, condensable vapors, and gases containing dust particles. Therefore, in some industrial fields such as electronic semiconductors, pharmaceuticals, and petrochemicals that have strict requirements for clean vacuum environments and complex gas compositions, screw vacuum pumps are highly favored and have gradually become a replacement product for traditional oil-sealed mechanical pumps and liquid ring pumps.